PLASMA-THERM Technical Workshop

8 March 2023

The workshop will focus on the fundamentals of plasma etching and deposition. Lectures will include the basics of plasma reactors and mechanisms for etching and deposition and review state-of-the-art etching and deposition technologies as applied to semiconductors, MEMS, and nanofabrication.

Meet the speaker

  • David Lishan, PhD

    After receiving his undergraduate degree in Chemistry from UC Santa Cruz and PhD from UC Santa Barbara in Solid State Electrical Engineering he has worked and published on a wide range of material, semiconductor, and chemistry R&D projects in the areas of lithography, photochemistry, x-ray mask fabrication, PVD, and plasma processing. During his 24 years at Plasma-Therm, he has had business unit management and worldwide marketing responsibilities as well as managing the development and release of the plasma dicing product.

    Currently, in dual roles as a Principal Scientist and a director in technical marketing, he has recently organized and presented plasma processing workshops at leading institutions throughout the world. His primary focus is on the application of plasma processing for R&D, MEMS, photonics, data storage, power, and compound semiconductor applications. He holds two patents in semiconductor processing and has over 60 publications and conference presentations.

    With Plasma-Therm, he has organized and presented plasma processing workshops at leading institutions throughout the world, including Harvard University, UC Berkeley, University of Notre Dame, UC Los Angeles (UCLA), University of South Florida, Stanford University, Lund University (Sweden), IMRE (Singapore), UC Santa Barbara (UCSB), ISCAS (Beijing, China), SINANO (Suzhou, China), Shanghai Jiao Tong University, UT Austin, Cornell University, Pennsylvania State University, KANC (S. Korea), University of Alberta, Weizmann Institute, University of Queensland, University of New South Wales, Politecnico di Milano, Fondazione Bruno Kessler (FBK) National Tsing Hua University and in Israel.

Agenda

The INL International Iberian Nanotechnology Laboratory, located in Braga (North of Portugal) was founded by the governments of Portugal and Spain under an international legal framework to perform interdisciplinary research, and deploy and articulate nanotechnology for the benefit of society.

INL aims to become the worldwide hub for nanotechnology addressing society’s grand challenges.

Location